Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10023970 | Dynamic current distribution control apparatus and method for wafer electroplating | Zhian He, David W. Porter, Frederick Dean Wilmot | 2018-07-17 |
| 10006144 | Method and apparatus for filling interconnect structures | Huanfeng Zhu | 2018-06-26 |
| 9865501 | Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer | Tighe A. Spurlin, George Andrew Antonelli, Natalia V. Doubina, James E. Duncan, David W. Porter | 2018-01-09 |