Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9989856 | Method of manufacturing semiconductor devices | Jung-Woo Seo, Sang Jin Kim, Jong-Hoon Nah, Choon-Ho Song | 2018-06-05 |
| 9859175 | Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same | Kiwook Song, Bum-Soo Kim, Kye Hyun Baek, Masayuki Tomoyasu, Eunwoo Lee | 2018-01-02 |