Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134617 | Wafer carrier having thermal cover for chemical vapor deposition systems | Alexander I. Gurary | 2018-11-20 |
| 10099185 | Enhanced enclosures for acoustical gas concentration sensing and flow control | Ray Logue, Don N. Sirota, Karthik Karkala, Christopher A. Morath, Arindam Sinharoy | 2018-10-16 |
| 9982362 | Density-matching alkyl push flow for vertical flow rotating disk reactors | Bojan Mitrovic, Alexander I. Gurary, William E. Quinn | 2018-05-29 |
| 9938621 | Methods of wafer processing with carrier extension | Bojan Mitrovic, Guanghua Wei, Ajit Paranjpe | 2018-04-10 |