Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10134617 | Wafer carrier having thermal cover for chemical vapor deposition systems | Eric A. Armour | 2018-11-20 |
| 10136472 | Terminal for mechanical support of a heating element | Arno Plankensteiner, Christian Peter Feist, Vadim Boguslavskiy, Chenghung Paul Chang | 2018-11-20 |
| 10002805 | Processing methods and apparatus with temperature distribution control | Mikhail Belousov, Vadim Boguslavskiy, Bojan Mitrovic | 2018-06-19 |
| D819580 | Self-centering wafer carrier for chemical vapor deposition | Sandeep Krishnan, Chenghung Paul Chang, Earl Marcelo | 2018-06-05 |
| 9982362 | Density-matching alkyl push flow for vertical flow rotating disk reactors | Bojan Mitrovic, William E. Quinn, Eric A. Armour | 2018-05-29 |
| D810705 | Self-centering wafer carrier for chemical vapor deposition | Sandeep Krishnan, Chenghung Paul Chang, Earl Marcelo | 2018-02-20 |