Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10017876 | Chemical vapor deposition flow inlet elements and methods | Mikhail Belousov, Keng Moy | 2018-07-10 |
| 10002805 | Processing methods and apparatus with temperature distribution control | Alexander I. Gurary, Mikhail Belousov, Vadim Boguslavskiy | 2018-06-19 |
| 9982362 | Density-matching alkyl push flow for vertical flow rotating disk reactors | Alexander I. Gurary, William E. Quinn, Eric A. Armour | 2018-05-29 |
| 9938621 | Methods of wafer processing with carrier extension | Guanghua Wei, Eric A. Armour, Ajit Paranjpe | 2018-04-10 |