Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10138117 | Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility | Li-Min Chen, Steven Lippy, Daniela White | 2018-11-27 |
| 9929014 | Dopant precursors for mono-layer doping | Thomas M. Cameron, Sung Han | 2018-03-27 |