Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10138117 | Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility | Li-Min Chen, Daniela White, Emanuel I. Cooper | 2018-11-27 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10138117 | Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility | Li-Min Chen, Daniela White, Emanuel I. Cooper | 2018-11-27 |