LC

Li-Min Chen

EN Entegris: 1 patents #16 of 85Top 20%
📍 Zhubeikou, CT: #1 of 1 inventorsTop 100%
Overall (2018): #330,631 of 503,207Top 70%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10138117 Aqueous formulations for removing metal hard mask and post-etch residue with Cu/W compatibility Steven Lippy, Daniela White, Emanuel I. Cooper 2018-11-27