Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9986598 | Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods | Matthew J. Busche, Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Michael R. Rice, Leon Volfovski | 2018-05-29 |