Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10014160 | Scanning electron microscope and method for controlling same | Kaori Shirahata, Makoto Sakakibara, Yasunari Sohda, Hajime Kawano, Hideyuki Kazumi | 2018-07-03 |
| 9966225 | Charged particle beam device, simulation method, and simulation device | Makoto Sakakibara, Hiroya Ohta, Junichi Tanaka | 2018-05-08 |