Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121634 | Charged particle beam device and charged particle beam measurement method | Natsuki Tsuno, Yoshinobu Kimura, Hajime Kawano, Junichiro Tomizawa | 2018-11-06 |
| 10037866 | Charged particle beam apparatus | Momoyo Enyama, Muneyuki Fukuda, Koichi Hamada, Sayaka Tanimoto | 2018-07-31 |
| 10014160 | Scanning electron microscope and method for controlling same | Kaori Shirahata, Daisuke Bizen, Makoto Sakakibara, Yasunari Sohda, Hajime Kawano | 2018-07-03 |
| 9997326 | Charged particle beam device | Hideto Dohi, Akira Ikegami | 2018-06-12 |