Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9991088 | Charged particle beam device and aberration corrector | Yasuhiro Shirasaki, Momoyo Enyama | 2018-06-05 |
| 9966225 | Charged particle beam device, simulation method, and simulation device | Daisuke Bizen, Makoto Sakakibara, Junichi Tanaka | 2018-05-08 |