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Changwoo Lee

Lam Research: 1 patents #185 of 426Top 45%
Overall (2018): #458,999 of 503,207Top 95%
1
Patents 2018

Issued Patents 2018

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9972502 Systems and methods for performing in-situ deposition of sidewall image transfer spacers Jae Ho Lee, Phil Friddle, Stefan Schmitz, Naveed Ansari, Michael Goss +1 more 2018-05-15