Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9982343 | Apparatus for providing plasma to a process chamber | Hyman Lam | 2018-05-29 |
| 9881787 | Deposition methods for uniform and conformal hybrid titanium oxide films | Benjamin Schmiege, Xuesong Lu, Juno Yu-Ting Huang, Yu Lei, Yung-Hsin Lee +7 more | 2018-01-30 |