Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068792 | Method and apparatus for liquid treatment of wafer shaped articles | Karl-Heinz Hohenwarter, Hongbo Si | 2018-09-04 |
| 9972514 | Apparatus for liquid treatment of wafer shaped articles | Dietmar Hammer, Reinhold SCHWARZENBACHER, Milan Pliska, Michael Brugger | 2018-05-15 |