AC

Anant Chimmalgi

KL Kla-Tencor: 5 patents #17 of 353Top 5%
Overall (2018): #31,709 of 503,207Top 7%
5
Patents 2018

Issued Patents 2018

Showing 1–5 of 5 patents

Patent #TitleCo-InventorsDate
10032620 Broadband light source including transparent portion with high hydroxide content Lauren Wilson, Matthew Panzer, Ilya Bezel 2018-07-24
9941655 High power broadband light source Rahul Yadav, Anatoly Shchemelinin, Ilya Bezel, Matthew Derstine 2018-04-10
9927094 Plasma cell for providing VUV filtering in a laser-sustained plasma light source Ilya Bezel, Anatoly Shchemelinin, Eugene Shifrin, Matthew Panzer, Matthew Derstine +3 more 2018-03-27
9899205 System and method for inhibiting VUV radiative emission of a laser-sustained plasma source Ilya Bezel, Kenneth P. Gross, Lauren Wilson, Rahul Yadav, Joshua Wittenberg +3 more 2018-02-20
9887076 Method and system for controlling convective flow in a light-sustained plasma Ilya Bezel, Anatoly Shchemelinin, Matthew Derstine, Kenneth P. Gross, David W. Shortt +2 more 2018-02-06