Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106398 | Micromechanical structure comprising carbon material and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +3 more | 2018-10-23 |
| 10081533 | Micromechanical structure and method for fabricating the same | Ulrich Schmid, Tobias Frischmuth, Peter Irsigler, Thomas Grille, Daniel Maurer +2 more | 2018-09-25 |
| 10005659 | Method for simultaneous structuring and chip singulation | Thomas Grille, Michael Roesner, Gudrun Stranzl, Martin Zgaga | 2018-06-26 |
| 9939331 | System and method for a capacitive thermometer | Jonathan Silvano de Sousa, Tobias Frischmuth, Peter Irsigler, Ulrich Schmid, Thomas Grille +1 more | 2018-04-10 |
| 9941432 | Semiconductor devices, a fluid sensor and a method for forming a semiconductor device | Stefan Clara, Thomas Grille, Peter Irsigler, Bernhard Jakoby, Ventsislav Lavchiev +2 more | 2018-04-10 |
| 9903816 | Photonic crystal sensor structure and a method for manufacturing the same | Jonathan Silvano de Sousa, Thomas Grille, Thomas Neidhart, Peter Irsigler, Vijaye Kumar Rajaraman | 2018-02-27 |