Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157765 | Methods for processing a semiconductor workpiece | Martin Zgaga, Rainer Leuschner, Bernhard Goller, Bernhard Boche, Manfred Engelhardt +5 more | 2018-12-18 |
| 10032670 | Plasma dicing of silicon carbide | Michael Roesner, Manfred Engelhardt | 2018-07-24 |
| 10020264 | Integrated circuit substrate and method for manufacturing the same | Michael Roesner, Manfred Engelhardt, Martin Zgaga | 2018-07-10 |
| 10005659 | Method for simultaneous structuring and chip singulation | Thomas Grille, Ursula Hedenig, Michael Roesner, Martin Zgaga | 2018-06-26 |
| 9966277 | Arrangement and method for manufacturing the same | Markus Zundel, Andre Schmenn, Damian Sojka, Isabella Goetz, Sebastian Werner +3 more | 2018-05-08 |