Issued Patents 2018
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157765 | Methods for processing a semiconductor workpiece | Gudrun Stranzl, Martin Zgaga, Rainer Leuschner, Bernhard Goller, Bernhard Boche +5 more | 2018-12-18 |
| 10074566 | Semiconductor device and methods for forming a plurality of semiconductor devices | Johannes Baumgartl, Oliver Hellmund, Iris Moder, Ingo Muri | 2018-09-11 |
| 10043640 | Process tools and methods of forming devices using process tools | — | 2018-08-07 |
| 10043683 | Plasma system, chuck and method of making a semiconductor device | — | 2018-08-07 |
| 10032670 | Plasma dicing of silicon carbide | Michael Roesner, Gudrun Stranzl | 2018-07-24 |
| 10020264 | Integrated circuit substrate and method for manufacturing the same | Michael Roesner, Gudrun Stranzl, Martin Zgaga | 2018-07-10 |
| 10020285 | Method of producing a semiconductor device and a semiconductor device | Edward Fuergut, Hannes Eder, Bernd Roemer | 2018-07-10 |
| 9875926 | Substrates with buried isolation layers and methods of formation thereof | Iris Moder, Ingo Muri, Johannes Baumgartl, Oliver Hellmund, Hans-Joachim Schulze | 2018-01-23 |