Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10106398 | Micromechanical structure comprising carbon material and method for fabricating the same | Ulrich Schmid, Peter Irsigler, Thomas Grille, Daniel Maurer, Ursula Hedenig +3 more | 2018-10-23 |
| 10081533 | Micromechanical structure and method for fabricating the same | Ulrich Schmid, Peter Irsigler, Thomas Grille, Daniel Maurer, Ursula Hedenig +2 more | 2018-09-25 |
| 9939331 | System and method for a capacitive thermometer | Jonathan Silvano de Sousa, Peter Irsigler, Ulrich Schmid, Thomas Grille, Ursula Hedenig +1 more | 2018-04-10 |