Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103004 | System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Matthias Firnkes, Dieter Winkler | 2018-10-16 |
| 10056228 | Charged particle beam specimen inspection system and method for operation thereof | Gilad Erel, Michal Avinun-Kalish | 2018-08-21 |
| 9953805 | System for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Matthias Firnkes, Dieter Winkler | 2018-04-24 |