Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103004 | System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Matthias Firnkes, Stefan Lanio | 2018-10-16 |
| 9953805 | System for imaging a secondary charged particle beam with adaptive secondary charged particle optics | Matthias Firnkes, Stefan Lanio | 2018-04-24 |