Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146123 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2018-12-04 |
| 10114281 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Takenori Kajiwara | 2018-10-30 |
| 10101650 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Ryo Ohkubo, Hiroaki Shishido, Yasushi Okubo | 2018-10-16 |
| 10088744 | Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Takashi Uchida | 2018-10-02 |
| 9939723 | Mask blank, method of manufacturing phase shift mask, phase shift mask, and method of manufacturing semiconductor device | Hiroaki Shishido, Takashi Uchida | 2018-04-10 |
| 9864268 | Mask blank, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Hiroaki Shishido | 2018-01-09 |