Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101650 | Mask blank, transfer mask, method for manufacturing transfer mask, and method for manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido, Yasushi Okubo | 2018-10-16 |
| 9952497 | Mask blank and method of manufacturing phase shift mask | Yasushi Okubo | 2018-04-24 |