Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146123 | Mask blank, phase shift mask, method for manufacturing phase shift mask, and method for manufacturing semiconductor device | Hiroaki Shishido, Osamu Nozawa | 2018-12-04 |
| 10114281 | Mask blank, phase shift mask, and method for manufacturing semiconductor device | Osamu Nozawa, Hiroaki Shishido | 2018-10-30 |
| 10083715 | Method of manufacturing a perpendicular magnetic disc | Kazuaki Sakamoto | 2018-09-25 |