Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Kosuke Takagi, Takeo Hanashima, Mamoru Sueyoshi +1 more | 2018-07-24 |
| 9869022 | Substrate processing apparatus | — | 2018-01-16 |