Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Takaaki Noda, Shingo NOHARA, Kosuke Takagi, Takeo Hanashima, Kotaro Konno +1 more | 2018-07-24 |