Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10062562 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kotaro Konno | 2018-08-28 |
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Shingo NOHARA, Kosuke Takagi, Takeo Hanashima, Mamoru Sueyoshi, Kotaro Konno +1 more | 2018-07-24 |
| 9865451 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shingo NOHARA, Yoshiro Hirose | 2018-01-09 |