Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101150 | Height measurement device and charged particle beam device | Muneyuki Fukuda, Yoshinori Momonoi, Shou Takami | 2018-10-16 |
| 10002743 | Measurement system and measurement method | Shoji Hotta, Osamu Inoue | 2018-06-19 |
| 9934940 | Control device, charged particle beam apparatus, program and method for producing processed product | Satoshi Tomimatsu, Tsuyoshi Oonishi, Hideo Sakai | 2018-04-03 |