Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101150 | Height measurement device and charged particle beam device | Hiroki Kawada, Muneyuki Fukuda, Shou Takami | 2018-10-16 |
| 9892887 | Charged particle beam apparatus | Muneyuki Fukuda, Akihiro Miura, Fumihiro Sasajima, Hiroaki Mito | 2018-02-13 |