Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10102619 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2018-10-16 |
| 10020164 | Charged particle beam apparatus | Zhongwei Chen, Weiming Ren | 2018-07-10 |
| 9965844 | Inspection method and system | Wei Fang, Zhao-Li Zhang | 2018-05-08 |
| 9953803 | Local alignment point calibration method in die inspection | Wei Fang, Kevin Liu, Fei Wang | 2018-04-24 |