Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10157796 | Forming of marking trenches in structure for multiple patterning lithography | Laertis Economikos, Chanro Park, Ruilong Xie | 2018-12-18 |
| 10090402 | Methods of forming field effect transistors (FETS) with gate cut isolation regions between replacement metal gates | Chanro Park, Chang Ho Maeng, Junsic Hong, Laertis Economikos, Ruilong Xie | 2018-10-02 |
| 10056303 | Integration scheme for gate height control and void free RMG fill | Suraj K. Patil, Katsunori Onishi, Chih-Chiang Chang | 2018-08-21 |
| 10014180 | Tungsten gate and method for forming | Neal A. Makela, Vimal Kamineni, Chih-Chiang Chang | 2018-07-03 |