Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10121711 | Planar metrology pad adjacent a set of fins of a fin field effect transistor device | Sipeng Gu, Xiang Hu, Lokesh Subramany, Akshey Sehgal | 2018-11-06 |
| 10030971 | Measurement system and method for measuring in thin films | Cornel Bozdog, Sridhar Mahendrakar, Mainul Hossain, Taher Kagalwala | 2018-07-24 |
| 9995692 | Systems and methods of controlling a manufacturing process for a microelectronic component | Givantha Iddawela | 2018-06-12 |
| 9903707 | Three-dimensional scatterometry for measuring dielectric thickness | Padraig Timoney | 2018-02-27 |