Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025186 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Keita Kato, Michihiro SHIRAKAWA | 2018-07-17 |
| 9952509 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, method for manufacturing electronic device, and electronic device | Keita Kato, Michihiro SHIRAKAWA, Akiyoshi GOTO, Masafumi KOJIMA | 2018-04-24 |