Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114292 | Pattern forming method, resist pattern, and method for manufacturing electronic device | Naoki Inoue, Naohiro TANGO, Michihiro SHIRAKAWA, Kei Yamamoto | 2018-10-30 |
| 10025186 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Masafumi KOJIMA, Keita Kato, Keiyu OU, Michihiro SHIRAKAWA | 2018-07-17 |
| 10018913 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Masafumi KOJIMA, Michihiro SHIRAKAWA, Keita Kato | 2018-07-10 |
| 9996003 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Masafumi KOJIMA, Michihiro SHIRAKAWA, Keita Kato | 2018-06-12 |
| 9952509 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, method for manufacturing electronic device, and electronic device | Keita Kato, Keiyu OU, Michihiro SHIRAKAWA, Masafumi KOJIMA | 2018-04-24 |