Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10126653 | Pattern forming method and resist composition | Kaoru Iwato, Shohei Kataoka, Shinji Tarutani, Sou Kamimura, Yuichiro Enomoto +3 more | 2018-11-13 |
| 10025186 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Keiyu OU, Michihiro SHIRAKAWA | 2018-07-17 |
| 10018913 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Michihiro SHIRAKAWA | 2018-07-10 |
| 9996003 | Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device | Akiyoshi GOTO, Masafumi KOJIMA, Michihiro SHIRAKAWA | 2018-06-12 |
| 9952509 | Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, method for manufacturing electronic device, and electronic device | Keiyu OU, Michihiro SHIRAKAWA, Akiyoshi GOTO, Masafumi KOJIMA | 2018-04-24 |
| 9897922 | Method of forming pattern and developer for use in the method | Yuichiro Enomoto, Shinji Tarutani, Sou Kamimura, Kaoru Iwato, Kana Fujii | 2018-02-20 |
| 9880472 | Pattern formation method, pattern, and etching method, electronic device manufacturing method, and electronic device using same | Ryosuke Ueba | 2018-01-30 |