Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10115598 | Substrate holder, a method for holding a substrate with a substrate holder, and a plating apparatus | Masashi Shimoyama | 2018-10-30 |
| 10100424 | Method of adjusting plating apparatus, and measuring apparatus | Jumpei Fujikata, Masashi Shimoyama, Yuji Araki | 2018-10-16 |
| 10047454 | Plating apparatus and plating method | Yuji Araki, Jumpei Fujikata, Masashi Shimoyama | 2018-08-14 |