Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119198 | Method of cleaning substrate holder | Masashi Shimoyama | 2018-11-06 |
| 10113246 | Substrate holder, plating apparatus, and plating method | Yoshio Minami | 2018-10-30 |
| 10100424 | Method of adjusting plating apparatus, and measuring apparatus | Masashi Shimoyama, Yuji Araki, Mizuki Nagai | 2018-10-16 |
| 10047454 | Plating apparatus and plating method | Yuji Araki, Masashi Shimoyama, Mizuki Nagai | 2018-08-14 |
| 9972510 | Substrate cleaning apparatus and substrate cleaning method | — | 2018-05-15 |