Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10119198 | Method of cleaning substrate holder | Jumpei Fujikata | 2018-11-06 |
| 10115598 | Substrate holder, a method for holding a substrate with a substrate holder, and a plating apparatus | Mizuki Nagai | 2018-10-30 |
| 10100424 | Method of adjusting plating apparatus, and measuring apparatus | Jumpei Fujikata, Yuji Araki, Mizuki Nagai | 2018-10-16 |
| 10047454 | Plating apparatus and plating method | Yuji Araki, Jumpei Fujikata, Mizuki Nagai | 2018-08-14 |