Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096967 | Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source | Thomas Patrick Duffey | 2018-10-09 |
| 10090629 | Gas mixture control in a gas discharge light source | Tanuj Aggarwal | 2018-10-02 |