Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096967 | Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source | Rahul Ahlawat | 2018-10-09 |
| 10074953 | Erosion resistant electrodes for use in generating gas discharge laser | Siqi Luo, Richard C. Ujazdowski, Walter Dale Gillespie | 2018-09-11 |
| 10012544 | Homogenization of light beam for spectral feature metrology | Zhongquan Zhao, Brian Edward King | 2018-07-03 |
| 9945730 | Adjusting an amount of coherence of a light beam | Thomas F. A. Bibby, Joshua Jon Thornes, Rostislav Rokitski | 2018-04-17 |