Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096969 | Method for dither free adaptive and robust dose control for photolithography | — | 2018-10-09 |
| 10090629 | Gas mixture control in a gas discharge light source | Rahul Ahlawat | 2018-10-02 |
| 10036963 | Estimating a gain relationship of an optical source | — | 2018-07-31 |
| 9939732 | Controller for an optical system | — | 2018-04-10 |