Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10088756 | Lithographic apparatus and method | Sander Kerssemakers, Gerben Frank DE LANGE, Christiaan Alexander Hoogendam, Petrus Franciscus Van Gils, Jelmer Mattheüs KAMMINGA +2 more | 2018-10-02 |
| 10001709 | Lithographic apparatus, spectral purity filter and device manufacturing method | Vadim Yevgenyevich Banine, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors, Jan Bernard Plechelmus Van Schoot, Gerardus Hubertus Petrus Maria Swinkels +2 more | 2018-06-19 |
| 9989864 | Lithographic method and apparatus | Johannes Jacobus Matheus Baselmans | 2018-06-05 |