Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114299 | Lithographic apparatus | Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers +6 more | 2018-10-30 |
| 9977349 | Support device, lithographic apparatus and device manufacturing method | Hans Butler, Cornelius Adrianus Lambertus De Hoon, Ingmar August Kerp, Pieter Johannes Gertrudis Meijers, Jeroen Pieter Starreveld +4 more | 2018-05-22 |