Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10061213 | Sensor, object positioning system, lithographic apparatus and device manufacturing method | Johannes Antonius Gerardus Akkermans, Ruud Antonius Catharina Maria Beerens, Sander Christiaan Broers, Jeroen Johannes Theodorus Hendrikus De Best, Adrianus Marinus Wouter Heeren +6 more | 2018-08-28 |