Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9910368 | Patterning device manipulating system and lithographic apparatuses | Christiaan Louis Valentin, Erik Roelof Loopstra, Christopher Charles Ward, Daniel Nathan Burbank, Mark Josef Schuster | 2018-03-06 |