Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9874524 | In-situ spatially resolved plasma monitoring by using optical emission spectroscopy | Junghoon Kim, Soonwook Jung, Soonam Park, Dmitry Lubomirsky | 2018-01-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9874524 | In-situ spatially resolved plasma monitoring by using optical emission spectroscopy | Junghoon Kim, Soonwook Jung, Soonam Park, Dmitry Lubomirsky | 2018-01-23 |