Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911582 | Methods and apparatus for controlling photoresist line width roughness with enhanced electron spin control | Banqiu Wu, Ajay Kumar, Kartik Ramaswamy | 2018-03-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9911582 | Methods and apparatus for controlling photoresist line width roughness with enhanced electron spin control | Banqiu Wu, Ajay Kumar, Kartik Ramaswamy | 2018-03-06 |