Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9677944 | Temperature control for GaN based materials | Alexander I. Gurary, Mikhail Belousov | 2017-06-13 |
| 9653340 | Heated wafer carrier profiling | Vadim Boguslavskiy, Joshua Mangum, Matthew King, Earl Marcelo, Eric A. Armour +2 more | 2017-05-16 |