| 9728467 |
Method for modulating work function of semiconductor device having metal gate structure by gas treatment |
Yun-Tzu Chang, Shih-Min Chou, Kuo-Chih Lai, Ching-Yun Chang, Hsiang-Chieh Yen +3 more |
2017-08-08 |
| 9691704 |
Semiconductor structure and method for manufacturing the same |
Kuo-Chih Lai, Chia-Chang Hsu, Ching-Yun Chang, Yen-Chen Chen, Shih-Min Chou +4 more |
2017-06-27 |
| 9659937 |
Semiconductor process of forming metal gates with different threshold voltages and semiconductor structure thereof |
Ching-Yun Chang, Chi-Mao Hsu, Wei-Ming Hsiao, Kuo-Chih Lai |
2017-05-23 |
| 9653300 |
Structure of metal gate structure and manufacturing method of the same |
Chien-Hao Chen, Hsin-Fu Huang, Chi-Yuan Sun, Wei-Yu Chen, Min-Chuan Tsai +2 more |
2017-05-16 |
| 9576803 |
Method for tuning metal gate work function before contact formation in fin-shaped field effect transistor manufacturing process |
Kuo-Chih Lai, Yang Lu, Ching-Yun Chang, Yen-Chen Chen, Shih-Min Chou +3 more |
2017-02-21 |